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Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD

Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD

기본 정보
Product Name Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD
Sale Price Call for Price
Product Code OTF1200XIIIC4HV80
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(* denotes required field)Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15 inch Laptop + USB-to-RS485 Cable

Personalization(Select the chamber size and quartz tube*)

 

The OTF-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

OTF-1200X-III series tube furnace




Casing
Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube
Material: Fused quartz tube
One processing tube is included with the furnace.
Please select the tube size in the option bar to update the price.

Thermal Block Placement
       click here to choose a crucible
Power
7KW
Rated Voltage
AC 208-240V Single phase, 50/60Hz
Heating Element
Fe-Cr-Al Alloy doped by Mo
Working Temp.
Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate
Heat-up rate: 1~20°C/min programmable
Heating Zone Length
Total heating zone: 900mm   (300mm + 300mm + 300mm)
Temp. Controller
  •      •  Three precision temperature controllers to control three
             zones separately.
  •      •  PID automatic control with 30 steps programmable
             segments.
  •      •  Temperature accuracy: ±1°C
  •      •  Thermocouple: K type built inside the furnace
Vacuum Seal
One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves
- one KF-40 connector for the high vacuum station.
Rated Voltage
AC 208-240V Single Phase, 50/60Hz
Dimension
1100(L) x 450(W) x 670(H), mm
High Vacuum Station
Structure
Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Volume Flow Rate
Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working RangeFrom 1000 mbar to <1E-7 mbar
Ultimate Pressure<1E-8 mbar (without any leaking )
Voltage & Power110VAC or 220VAC, 110W
Mass Flow Gas Control

Structure


  •      •  
    2-9 Channel Gas Control System with PLC Touch Panel and
              PC Operation Software
  •      •  LED display
  •      •  4 channel MFC Made of 316 stainless steel with gas
             flow range as below:
    •          º  Controller 1: 0~100SCCM
    •          º  Controller 2: 1~199 SCCM
    •          º  Controller 3: 1~199 SCCM
    •          º  Controller 4: 1~499 SCCM
  •      •  4 Channel gas go through a Gas mixing
            tank:
     Φ80X120mm  
  •      •  Dimension: 600(L) x 745(W) x 700(H), mm

Power18W
Rated Voltage
AC 208-240V, Single phase, 50/60Hz
 
Shipping & Warranty

Shipping DimensionTotal Three Pallets   ( #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" )
Shipping Weight850 lbs

Optionals
          


Warranty


One year limited warranty

(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty,
please order the replacement at related products below.)


Compliance


  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified
  •      •  The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
             (please click marks below to learn details)

                              


Notes


- Please click
 here to see our typical temperature profile calibration result at various temperature.
- In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by
   yourselves.
Please click here to learn how
.

- How to set up a ceramic tube and vacuum flange for MTI Tube furnace.


Warning


Click here to learn the installation of a gas regulator

  •      •  The tube furnaces with quartz tube are designed for using under vacuum and low pressure
              <
    0.2 bar / 3 psi / 0.02 MPa
  •      •  Attention: A two stage pressure regulator must be installed on gas cylinder to limit the
            pressure to below 3 PSI for safe operation.
     
            Click here to learn the installation of a gas regulator.
  •      •  The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
             shocks to the tube
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
            used up to 1000°C


Operation Instructions