Furnace Structure
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• Compact 4“ RTP Tube Furnace- • Double layer steel case with mullite liner to eliminate the need for water cooling or air cooling
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| Power Input | 208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required) |
| Heating Zone | 12" length with 4" constant temperature zone within +/-1°C uniformity |
Working Temperature
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• 1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~
1100ºC. Otherwise, the O-ring may melt)- • Furnace can be heated to 1100°C at 50 °C/second, and fast cooling by opening the cover.
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| Max Heating Rate | 50°C/Sec |
| Max Cooling Rate | 60° C/min (Under vacuum: 200 mtorr), 117° C/min (under atmospheric pressure) |
| Heating Elements | 8 pcs Halogen light tube (D=10 L=300 T =200, mm) |
Temperature Controller |
• PID automatic control with 30 programmable segments for precise control of heating rate, cooling
rate and dwell time.- • Built in overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • PC Control:
- º A MTS-02 control module is included for PC control on this furnace.
- º A laptop PC can be ordered for $900 together with the furnace. We recommend
ordering a computer (laptop) from us to avoid software installation problems as we will
perform installation and testing before shipping. For more information please click here.
  
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Quartz Tube & Sample Holder |
• Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length.- • One 3" diameter AlN sample holder for annealing samples up to 3" dia. AlN has very high thermal
- conductivity which provides the best temperature uniformity in the sample area.
- • The sample holder is removable from the flange for using the RTP furnace with other purposes.
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Vacuum Flange
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• KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings,
needle valves and water cooling jacket.- • Only requires water cooling in long running times at temperatures > 600oC.
- • Circulating water rate: 0.5 m3 /hr.
- • Slide-out flange provides an easier way of loading, unloading the samples and other specific
process needed. - • Insert-able thermal-couple for accurate measurement.
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Water Cooling Jacket
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• Cooling water is required.- • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system
(please click link on left to order separately) to save water.
Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.
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| Flow Meter | One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min |
Gas Mixer |
• Three gas flow-meters (A: 10 - 100 mL/min; B: 16 - 160 mL/min; C: 25 - 250 mL/min flow rate and
4% accuracy FS) are installed inside the mobile case to monitor the flowing rate of each gas.- • Four stainless steel valves are installed in side panel of mobile cart to control mixing gases and
three inlet gases separately. - • One pressure gauge is installed on gas mixer to monitor the pressure of mixed gas in tank.
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Vacuum Pump
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- • UL Certified 156 L/m Double Stage Rotary Vace Vacuum Pump with Exhaust Filter - EQ-FYP-Pump
- • Stainless steel hose tube is included for connecting to tube furnace.
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Dimensions |
• RTP Furnace: 760 X 330 X 530 mm (30"W x 13"L x 21" H)- • Gas Mixer: 600 mm (L) x 600 mm (W) x 650 mm ( H)
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Net Weight |
• RTP Furnace: 45 kg (100 lbs)- • Gas Mixer: 165 lbs
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| Shipping Weight | 545 lbs with two pallets |
| Warranty | One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.) |
Compliance |
• CE Certified- • MET certified 30 programmable segments for precise control of heating rate, cooling rate and
dwell time. - • The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost.
Please contact us for quote and detail information. - • Vacuum Pump is TUV Certified
     
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Application Notes
Click here to learn the installation of a gas regulator
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• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <0.2 bar
/ 3 psi / 0.02 MPa- • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used
up to 1000°C - • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the
pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
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