Furnace structure
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Rated voltage
| AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
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Power consumption
| 6 KW Max.
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Heating elements
| Fe-Cr-Al Alloy doped by Mo
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Heating zone length
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• Three zones: 610mm (24") in total- • Z1-Z2- Z3：152.4mm (6") + 304.8mm (12") + 152.4mm (6")
- • +/-1ºC Constant Temperature Zone: 260 mm length
- • +/-2ºC Constant Temperature Zone: 480 mm length (click the pic below for detail)
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Fused Quartz Tube(Please choose from product option) |
Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1219 L (mm) 2" wafer Max. |
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L (mm) 3" wafer Max.
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Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L (mm) 4" wafer Max. |
Warning： The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 Mpa (absolute pressure)
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Heating temperature
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• Max. Heating Temperature: 1200°C at flowing gas - • Continuous Heating Temperature: 1100°C at flowing gas
- • Max. Heating temperature at Vaccum 1000°C
- • Max. Heating Rate: 20°C/min
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Temperature Controllers |
• PID automatic control with 30 programmable segments for precise control of heating rate,
cooling rate and dwell time.- • Built-in overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • Three K-type thermocouples (one for each zone).
- • RS485 Communications Port.
- • Optional:
- º The furnace may be operated by PC by installing a control module.
Please order an MTS-02 control module at extra cost. - º The new version of PC module is now compatible with Lab View 05/08/2014
- º If you order the PC control module together with the furnace, we will install and test
it before shipping. We recommend you to order a computer laptop from us to avoid
software installation problems. For more information please click here.
  
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European Temperature Controllers (optional upgrade)
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• 1 heating channel- • 1 programs of 8 or 24 segment
- • Alarm Relay: Form 'A' and Form ‘C’ built-in
- • Digital Communications: RS485
- • Temperature Accuracy: ± 0.1ºC
- • Recipes: Using a PC tool recipes can be created that can be used to change the operating
parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful
where multiple products are processed using the same controller but require different
parameters to be set.
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Vacuum Flange and Gauge
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• Hinged type flanges are installed on both ends for easy sample loading/unloading;- • KF25D adapter installed on left flange with a precision digital vacuum gauge;
- • SS needle valve with 1/4" pipe connector installed on right flange;
- • Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by molecular
pump; - • Optional: you may choose our molecular vacuum pump station for higher vacuum
 
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Optional Part |
In order to build a complete CVD system, you may need bubbler or gas delivery system, and quartz wafer Carrier. . Please click picture below to choose:
   
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Dimensions
| 750mm(L) x 525mm(W) x 670mm(H) |
Net Weight
| 70 kg
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
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Laptop, software & WiFi Control(Optional) | |
Compliance |
• CE/UL/CSA Certificate- • Please select the certificate in option bar:
- º CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
- º UL certificate - UL approval (UL 61010)
 
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Shipping dimensions
| 65"(L) x 45"(W) x 35"(H)
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Shipping weight
| 340lbs
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Application Notes
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| Operation Instructions | |
