Multi-Zone Tube Furnace...

1700°C Three Zone 60mm Alumina Tube Furnace with Gas Mixer & Vacuum* System - GSL-1700X-60-III-F3LV

1700°C Three Zone 60mm Alumina Tube Furnace with Gas Mixer & Vacuum* System - GSL-1700X-60-III-F3LV

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Product Name 1700°C Three Zone 60mm Alumina Tube Furnace with Gas Mixer & Vacuum* System - GSL-1700X-60-III-F3LV
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Product Code GSL1700XIIIF3LV60
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상품 옵션
Personalization Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15 inch Laptop + USB-to-RS485 Cable

 

GSL-1700X-60-III-F3LV  is a CE certified three zones tube furnace with 60mm Dia. alumina tube, mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5x10^-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS


 
Furnace Structure

  •      •  Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of
             outside case < 55
    oC.
  •      •  High purity fibrous alumina insulation for Max, energy saving.
  •      •  Three independent heating zone via three precision temperature controllers.
  •      •  Click picture on left to review detail specification


Thermal Block Placement
     
  


Power Consumption
 10 KW
Input Voltage
 AC 208-240V Single Phase, 50/60 Hz (75A air breaker required)

Heating Zone


Three zones: total 25" (630 mm) heating zone (included two refractory separators)

  •      •  Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
    •          º  Working temperature  800 - 1400°C
    •          º  Heating rate: 10°C/min
  •      •   Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
    •          º  Working temperature 800 - 1700°C
    •          º  Max. Heating rate: 5°C/min
  •      •  Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
    •          º  Working temperature  800 - 1400°C
    •          º  Max. Heating rate:  10°C/min


Tube Size and Flange


  •      •  99.8% purity Alumina Tube
  •      •  2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
  •      •  60 mm stainless steel vacuum sealing flange with valve and meter is included
  •      •  Two porous ceramic blocks are included for protecting flange from heating radiation


Temperature Controller

  •      •  Three precision temperature controllers to control three zones separately.
  •      •  PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired,
            current limiting resistor.
  •      •  30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  •      •  Built-in overheating & broken thermocouple protection.
  •      •  Over temperature protection and alarm allows for operation without attendant(s).
  •      •  +/- 1 ºC temperature accuracy.
  •      •  RS485 Communications Port.

  •      •  Optional:  
    •          º  The furnace may be operated by PC by installing three control modules.
                   Please order the
      MTS-02 control modules at extra cost.
    •          º  If you order the PC control module together with the furnace, we will install and test it
                  before shipping. We recommend you to order a computer laptop from us to avoid
                  software installation problems. For more information please
      click here.

                                         
                 


European Temperature Controllers (optional upgrade)


  •      •  1 heating channel
  •      •  1 programs of 8 or 24 segment
  •      •  Alarm Relay: Form 'A' and Form ‘C’ built-in
  •      •  Digital Communications: RS485
  •      •  Temperature Accuracy:  ±  0.1ºC
  •      •  Recipes: Using a PC tool recipes can be created that can be used to change the operating
            parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where
            multiple products are processed using the same controller but require different parameters
            to be set.


Vacuum Gauge

  •      •  
    Corrosion-proof Capacitance Diaphragm Gauge
     with ceramic coated sensor head specially
              designed for vacuum measurements with the presence of corrosive gases.
  •      •  Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
             range (10^
    -5 ~ 1000 torr).
  •      •  Optional:   click  the pic-below- right to order Constant temperature control module.

               Vacuum pressure gauges
 

Vacuum Pump
 

  •      •  Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust
            System
     
    installed inside the vacuum station. The vacuum system can reach 5x10^-2 torr within
             30 minutes of pumping
    . ( 220V is available for the outside USA)
  •      •  One KFD25 adaptor is installed to flange for connecting to vacuum pump.
  •      •  Stainless steel pipe ( 25mm Dia x 1000mm length ) is included for connecting to tube furnace
             with
     KFD25 adaptor and clamps.
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution
EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge.
 It controls pressure range from 10^-6 torr ~ 760 torr.




Three Channel Gas Mixing and Delivery System



  •      •  Three gas flow-meters ( 4% accuracy FS)
     are installed inside mobile case which are able to monitor
             gases flowing rate (three different kinds of gases in total)
      click picture on left to see detail specs
          1) Compact direct read flow meter, 10-100 cc/min.
          2) 
Compact direct read flow meter, 16-160 cc/min.
          3) Compact direct read flow meter, 25-250 cc/min.
  •      •  One pressure meters is installed inside mobile cart which are able to monitor the pressure of mixing
              tank.
  •      •  4 stainless steel needle valves are installed on the mobile cart
  •      •  Two gas flowing pipes are provided for immediately use (one pipe from two mixed gases and
            another is independent gas)
     
  •      •  Optional:  in order to control gas delivery accurately, you may choose three channel gas delivery
            system controlled by precision digital mass flow meter at extra cost.  Click picture below to see
            detail specs

           


Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or
reducing oxidation. Please click the picture below to learn more:

         


Power Cable & Plug


  •      •  10 feet length 8-3 AWG heavy duty UL approved power cable is included
  •      •  Extra length cable can be ordered by clicking picture on left
  •      •  Plug is not included, you can order from your local hardware store according to female plug in
            your lab


Dimensions

  •      •  Furnace:   863 L x 457 W x 711 H mm (34 L x 18 W x 28 H  inch)
  •      •  Gas cart:  850 mm (L) x 600 mm  (W) x 700 mm ( H)

Net Weight
150Kg (furnace) + 100Kg  ( total  550lb)
Shipping Weight
800 lbs
Shipping Dimensions
Two cases in one pallet: 45x45x35/case

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).


Laptop, software & WiFi Control (Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
             immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for
            more information.
  •      •  Note:
            The software is only compatible with MTI’s Yudian Temperature Controller

               


Compliance

  •      •  CE Certified
  •      •  UL / MET / CSA Certification is available upon request, additional charges will apply
  •      •  Temperature controller is MET and CE Certified
  •      •  Transformer is UL Certified
                           


Application Notes

  •      •  The tube furnaces with alumina tube are designed for using under vacuum and low pressure
            < 0.02 Mpa / 0.2 Bar/ 3 PSI
  •      •  Never use graphite crucible in alumina tube.
  •      •  Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the
            pressure to below 3 PSI for safe operation.
            
    Click here to learn the installation of a gas regulator.
  •      •  The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  •      •  Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely
            used up to 1500°C


Operation Instructions