1500 - 1600C tube furnace UL/CSA Ready

1500°C Six Zone Split Tube Furnace with Flange & Mullite Tube (60 mm O.D.) - OTF-1500X-6Z

1500°C Six Zone Split Tube Furnace with Flange & Mullite Tube (60 mm O.D.) - OTF-1500X-6Z

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Product Name 1500°C Six Zone Split Tube Furnace with Flange & Mullite Tube (60 mm O.D.) - OTF-1500X-6Z
Sale Price Call for Price
Product Code OTF-1500X-6Z
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15 inch Laptop + USB-to-RS485 Cable

OTF-1500X-6Z- is a six-zone split tube furnace with alumina tube and vacuum-sealed flange working up to 1500°C. Six 30 segments temperature controllers are installed with S type thermal couples and  +/ - 1°C accuracy. It is an excellent furnace for high-temperature CVD and annealing application


Power Input22 KW
Working Voltage AC220+/- 10% VAC three-phase 50/60Hz
( 100 A breaker required)
Working TemperatureMax.                1500°C 《 30 minutes
Continuous:      800 -1400°C
Recommend Heating rate5°C/min.
Processing Tube

Material:  Alumina
Size:   60 O.D x 51 I.D x 1800mm L

Heat Zone Length

  •      • 
    Six heating zones:   
      12" +8" + 8" + 8" + 8" + 12"
  •      •  Total heating zone length:  1422 mm  ( ~ 56")
  •      •  Constant Temperature Zone:   800 mm  +/- 5ºC. ( If set 6 zones at the same temperature,
             without zone spacer. If you don't need the zone spacer, you shall inform us in advance)
  •      •  The Built-in heating zone space to create a thermal gradient up to 100ºC/ cm

Overall Dimensions1950 mm L × 660 mmW × 762 mmH

Temperature Controllers

  •      •  6 digital temperature controllers for controlling each heating zone
  •      •  PID automatic control with 30 programmable segments for precise control of heating rate,
            cooling rate and dwell time.
  •      •  Built-in overheating & broken thermocouple protection.
  •      •  Over-temperature protection and alarm allow for operation without attendant(s).
  •      •  +/- 1 ºC temperature accuracy.
  •      •  RS485 Communications Port.
  •      •  Optional:  
    •          º  The furnace may be operated by PC by installing a control module.
                   Please order an
      MTS-02 control module at extra cost.
    •          º  If you order the PC control module together with the furnace, we will install and test
                  it before shipping. We recommend you to order a computer laptop from us to avoid
                  software installation problems. For more information please
      click here.


European Temperature Controllers (optional upgrade)

  •      • 
    1 heating channel
  •      •  1 program of 8 or 24 segment
  •      •  Alarm Relay: Form 'A' and Form ‘C’ built-in
  •      •  Digital Communications: RS485
  •      •  Temperature Accuracy:  ±  0.1ºC
  •      •  Recipes: Using a PC tool recipes can be created that can be used to change the operating
             parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful
             where multiple products are processed using the same controller but require different
             parameters to be set.

Laptop, software & WiFi Control(Optional)

  •      •  Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit
            temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters of operating range.
  •      •  The above features are available upon request at an extra cost (up to $1,000).
  •      •  Note: The software is only compatible with MTI’s Yudian Temperature Controller


Vacuum Level

  •      •  10E-2 torr by quality mechanical vacuum pump
  •      •  10-5 torr by molecular pump

Thermal Block Placement

  •      •  Two thermal blacks are included. Please click the picture below to learn how to place them
             inside tube
  •      •  You may order flange support to avoid tube rotating ( click Pic below right )


Heating Elements & Thermal couples

  •      •  48 pcs  1500ºC grade Silicon carbide rod  (14mm Dia. x 150mm heating  x  413mm length)
  •      •  The heating element is consumable, Please click the picture below to order spare and
  •      •  Six S-type thermocouples (one for each zone).
Net Weight~ 300 Kg

Application Notes

  •      •  The tube furnaces with mullite tube are designed for use under vacuum and low pressure
            < 0.02 Mpa
  •      •  Never use graphite crucible and the alumina tube.
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
            pressure to below 3 PSI for safe operation.

  •      •  The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  •      •  Vacuum pressures may only be safely used up to 1300°C for all mullite tube furnaces:
  •      •  Customized long heating zone up to 1200 mm L  with 700 mm uniform temperature zone
            ( +/- 5
    °C) , 安定1800mm mullite tube is available upon request;
            ( click the picture below to see sketch)

Operation Instructions


  •      •  One year limited warranty with lifetime support (consumable parts such as processing tubes,
             and O-rings are not covered by the warranty, please order replacements at related products
  •      •  ATTENTION: Any damages caused by the use of corrosive and acidic gases are not
             under the coverage of MTI One Year Limited Warranty.


  •      •  CE Certified
  •      •  NRTL (UL61010) or CSA certification is available upon request at extra cost.

  •      •