Furnace Structure |
• Double layer steel structure with air cooling to keep case temperature <65°C- • High purity fibrous alumina insulation with the Special coating to ensure max. energy saving
   
|
Power | 6KW |
Voltage | AC 208-240V Single Phase, 50/60 Hz |
Max. Temperature | 1200°C(<1 hr) |
Continuous Temperature | 1100°C for each zone |
Max. Heating Rate | <= 20°C/min. |
Processing Tube
|
• High purity quartz tube with 1200oC max. working temperature- • Size: OD: 80 mm,x ID. 72 mm x 1000mm Length
- • Upgrade note:( Processing tube can be replaced by mullite tube from 60 mm OD to 100 mm
OD at extra cost, then furnace can be used up to 1250°C )
|
Heating Zone length | 440mm (single zone) |
Constant Temperature Zone | 150mm (+/-1°C) |
Temperature Accuracy | +/- 1°C |
Temperature Controller
|
• MET certified 30 programmable segments for precise control of heating rate, cooling rate
and dwell time.- • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communication Port.
- º Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers) + 15"
laptop package is available at the options bar.
Click for the detail information about the MTS02-Y software kit. - º You may upgrade the temperature controller to the Eurotherm 3504 Temperature
Controller which is fully compatible with LabVIEW. This package includes a
Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software
CD. Click the pic below to view the full spec of Eurotherm 3504 temperature
controller.
|
Vacuum & Fitting Ports
 | |
Vacuum Level
|
• 10E-2 Torr by mechanical vacuum pump.
• 10E-5 Torr by molecular pump. • Leak rate < 5 mTorr / min.
|
Heating Element | 1300°C Fe-Cr-Al Alloy doped by Mo |
Dimensions | 550mm(L) x 380mm(W) x 520mm(H) exclude mobile cart 600mm(L) x 600mm(W) x 1200(H) install with mobile cart |
Net Weight | About 80kg (excluding mobile cart) |
Shipping size | 48"(L) x 40" (W) x 72''(H) |
Shipping weight | 400lbs |
Warranty | One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.) |
Laptop, software & WiFi Control (Optional)
| |
Compliance |
• CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
（ please click marks below to learn details )
    
|
|
Application Notes
( We may help you to build customized flange to meet your application at extra cost )
| - • Please click picture below to learn how to quenching sample in gas flow and vacuum
The furnace ca be modified into an HPCVD ( hybrid physical-chemical vapor deposition )
furnace via DIY a sample susceptor ( click picture below-right to see how )- º Approach#1: Traditional wire cut and free-falling
- º Approach#2: Electromagnetic release and free-falling. Please contact us for the
customization of this feature.
   
|
Warning
Click here to learn the installation of a gas regulator
|
• The tube furnaces with quartz tube are designed for using under vacuum and low pressure
<0.2 bars / 3 psi / 0.02 MPa- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation.
Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C
|
Operation Instructions | 
|
