Fluidized Zone
 
| Note: The gas is passed upward through the fluidized bed at a high enough velocity to lift the particles. However, particles may be swept away from the tube chamber entirely if the velocity was set too high. Depends on the particle size, you may want to adjust the gas in pressure and flow rate until particles are lifted and move turbulently inside of the tube.
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• 110VAC, 2.4 MHz ultra-high frequency Ultrasonic Generator can generate sub-microns solution
particles- • Fluoropolymer coated liquid container and Fluoropolymer sealing gaskets
- • external Fluoropolymer optical sensor and valve for keeping the liquid level to the correct height
and preventing damage to the nebulizing element, should the unit run dry. - • Ultrasonic power programmable,0~100%, 5% increment.
- • 304 Stainless Steel T-piece (1.5'' sanitary fitting) with 1/4'' tube fitting adapters enables the use of
carrier gas.
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Quartz Frit
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Frits with forced convection design can trap the particles within the central heating area- • Frit: 15~40 microns porous, 22mm O.D x 4mm thick
  
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Furnace Casing |
• Double layer steel structure with air cooling- • Split door design for easy installation of tube
- • High purity Al2O3 fibrous insulation designed for maximum energy saving
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Power | 1200W |
Voltage | AC 110V or 220V Single Phase, 50/60 Hz
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Max. Temperature | 1100oC |
Continuous Temperature | 1000oC |
Max. Heating Rate | <= 20 oC /min |
Tube Size and Materials
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• One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing- • Two Ends: 25mm O.D, 22mm I.D; Central: 50mm O.D, 44mm I.D, for detailed size, please refer to
the picture in below. - • Central enlarged area ensures the high aerodynamic performance
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Sealing Flanges
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• Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas - • Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and
exhaust, please click the picture in below for detail
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Optionals
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• Das delivery may be needed for gas control- • Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in
CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
  
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Heating Zone Length | 200mm (single zone) |
| Constant Heating Zone | 100mm (+/-2oC) |
Temperature Controller
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• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.- • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
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| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Fitting Ports
| 1/4'' Tube Fittings were installed on both sides of the flange for standard connection to the gas supplier |
Dimensions | 340mm×300mm×1000mm ( W x L x H) |
Net Weight | ~20 Kg (excluding mobile cart) |
Shipping Weight | 200 lbs |
Warranty
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Compliance
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• CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
（ please click marks below to learn details )
    
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Warning
Click here to learn the installation of a gas regulator
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• Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bars / 3 psi
/ 0.02 Mpa- • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
shocks to the tube - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation.
Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used
up to 1000°C
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Operation Instructions
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