Furnace
|
Structure
|
• Double layer steel casing with air cooling.
• High purity alumina fiberboard liner for energy cost effective operation.
• Three heating zones with three independent temperature controllers.
• Vacuum and gas mixing system are located in bottom Mobile cart with 4 wheels.
|
Heating
Element
| Fe-Cr-Al Alloy doped by Mo
|
Max.
Heating
Temp.
| 1200°C
|
Continuous
Heating
Temp.
| 1100°C
|
Max.
Heating
Rate
| <=20°C/min
|
Heating
Zone
Length
| Three zones: (880mm, 35" in total)
Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
|
Constant
Temp. Zone
| 20" (500 mm) length (three zones at equal temperature within +/- 1°C)
|
Tube Size
and
Materials
| Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
|
Temp.
Controller
|
Three precision digital temperature controllers programmable with 50 segments,
which control each heating zone separately.
PID adjustable with auto tune function to ensure temperature stability within +/ - 1
oC.
Full protection in each controller for over-temperature and broken thermal couple.
|
Thermocouple
| Three K-type thermocouples
|
Power Input
| AC 208~240V, Single Phase, 50/60Hz, 7KW max.
|
Vacuum Fittings
|
The Standard vacuum accessories include:
- • Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one
1/4"
Swagelok tube connector. - • Six pieces of high-temperature silicone O-ring for using under 300°C.
- • Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.
- • One KF-40 vacuum bellows
- • Three KF-40 quick clamps.
- • Two KF-25 quick clamps.
|
HV Station
High Vacuum Station
|
Structure |
Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Inside: Pfeiffer vacuum pump Made in Germany
Vacuum sensor is included
|
Vacuum
sensor | The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
|
Control
Panel |
One button operation - the diaphragm pump and the turbo molecular pump will
start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the
turbine spinning up and down according to the vacuum level and leaking rate of
the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating
and overcurrent if the leaking rate of the reaction chamber is too high to achieve
the high vacuum.
LCD screen - double lines parameters checking interface make the working easier
to be handled.
 |  |  |  |  | Self-testing
| Spinning up | Error report
| Voltmeter
| Full speed |
|
Volume Flow
Rate | Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s |
Working
Range | From 1000 mbar to <1E-7 mbar |
Ultimate
Pressure | 10^-5 torr (with tube furnace)
|
| Power Input | 110V AC or 220V AC switchable, 50/60Hz |
Power
consumption | Duration/Max power: 100/110Watt |
MFC Station
Mass Flow Controller
|
9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital
display panel of +/-1.5% of Full Scale.
- • Controller 1: 0~100 SCCM
- • Controller 2: 1~199 SCCM
- • Controller 3: 1~199 SCCM
- • Controller 4: 1~499 SCCM
- • Controller 5-9: measuring range can be customized based on customer's request
The flow rate control range is available for customization. Please contact us for detail information.
|
Optional Parts |
• Click picture below - left to order bubbler or evaporator for CVD
|
Gas Pipe Connect
|
• One 1/4“ Swagelok tube connect is installed in the left flange as the gas inlet.- • Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each
gas route.
The fifth one is used as the gas outlet. - • The 1/4" PTFE gas pipe is included in the standard package.
- • [Optional] If Stainless steel 1/4" gas tube is needed, please click here to order.
|
Shipping Info
| Dimension
| Furnace: 550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station: 600 x 600 x 700mm
|
Weight
| Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
|
Warranty
|
One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements
are not covered by the warranty, please order the replacement at related products below.)
|
Compliance |
• CE/UL/CSA Certificate- • Please select the certificate in options bar:
- º CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
- º UL certificate - UL approvals (UL 61010)
 
|
Warning
Click here to learn the
installation of a gas
regulator
|
• The tube furnaces with quartz tube are designed for using under vacuum and low pressure
< 0.12 MPa (absolute pressure)- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to
limit the pressure to below 3 PSI for safe operation.
Click here to learn the installation of a gas regulator. - • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing
thermal shocks to the tube - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C
|
| Operation Instructions |   Quick test instruction |
