Sapphire substrate is the popular substrates for III-V nitrides, superconductor and magnetic epi film due to less mis-matched lattice and stable chemical and physical properties.
Wafer size: 10 x 10 x 0.43 mm thick
Orientation: <0001> +/-0.5o
Polished surface: substrate surface is EPI polished via a special CMP procedure with RA < 5 A
2 sides polished
Package: Each wafer is packed in 1000 class clean room with 100 grade plastic bag with wafer container
