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1100C Max Vertical Vacuum Furnace with Flange (8" OD Quartz Chamber) - VBF-1200X-V9

1100C Max Vertical Vacuum Furnace with Flange (8" OD Quartz Chamber) - VBF-1200X-V9

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Product Name 1100C Max Vertical Vacuum Furnace with Flange (8" OD Quartz Chamber) - VBF-1200X-V9
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Product Code VBF-1200X-V9
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VBF-1200X-V9 is a Vertical vacuum-sealed furnace.It equips an Ø200×Ø190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.

SPECIFICATIONS

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 3 KW max. 
  • Note: Power cable included but without the plug. Please install a plug by your own or click the link below the picture to choose a plug according to your country or your lab requirements


Working Temperature

  • <1100°C under ambient pressure

  • <1000°C under vacuum
  • GE214 quartz tube is available for 1150oC working temperature at extra cost.

Heating Rate

  • <20°C/ min
  • Recommended: 10°C/ min

Heating Elements    

  • Ni-Cr-Al resistance wire

Quartz Tube & Effective Heating    

  • Tube size: Ø200×Ø190×H425 mm

  • Max. loading 40Kg
  • Heating area Ø240×H245 mm
Vacuum Flange

  • Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket
  • One 1/4 gas inlet and one gas outlet with needle valves. 
  • One bored Al2O3 foam refractory block (190Dia x 50mm) is provided
  • K25 port is built-in for connecting to the vacuum pump
  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa
Water Cooling

  • A water-cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C.  16L/min water flow required.
Temperature Controller

     
  • NRTL certified digital temperature controller is included
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port included for connecting to PC
  • Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy

Options
   

  • Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 1 to order)
  • You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
  • The furnace can be modified into a faster heating and cooling furnace ( Pic. 3)
    Pic. 1New Version front panelPic. 2 Pic. 3



Vacuum Pressure





  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10-2 torr via mechanical pump within 30 minutes without thermal Block
    • 10-5  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional: 
    • The vacuum pump and pipe are not included, please click Pic.1 to order
    • For achieving a higher vacuum level, a Turbopump Station is necessary. (click Pic.2)
    • Spare sealing O-ring is available at extra cost (click Pic.3)
    •  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click Pic.4)
       Pic. 1       Pic. 2   Pic. 3      Pic. 4

Options

You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
New Version front panel

Overall Dimensions

500×530×880 mm

Net Weight

70 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x 28"(W) x 35"(H) 


Warranty

  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
 

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.

Warning  

Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum.
  • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

Operation Demo Video