•2" wafer boat is made of ultra-high purity quart (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 2" diameter x 0.5 mm thickness in each boat •Design for diffusion, oxidation and annealing 2" Si wafer •Can fit in MTI OTF1200-3 tube furnace ( 3" tube furnace )