VHP-5T-4 is a customized electric vacuum lamination hot press for wafer bounding or thin film transform up to 100 mm x 100 mm flat. Its max. working temperature is 550 ºC and max. pressure is up to 6T.
SPECIFICATIONS
Structure
•Two 150 mm x 150 mm flat heating plates made of high temperature stainless steel with max. working temperature 550 ºC •1000W Heating tube is inserted into the center of the heating area for fast heating •Max. 6 metric tons •Two precision temperature controller which control two heating plate separately with 30 segements programmable •Water cooling jacket plates are built on bottom heating plate for fast cooling
Hydraulic Pump
•Modify 20T electric hydraulic press into flat lamination press •Movable distance : 15 mm •Automatic max. pressure controlled •Please click pictures below to see detail specs--- We will combine two press machine into a electric lamination press
Temperature control and Pressure Display
•Two heating plates's temperature are controlled separately by two precision temperature controllers with 30 segment programmable +/ 1 °C accuracy. ( please click picture below left to see detail ) •Temperature controller is built inise frame withPID auto tune function and protection from over-temperature and thermal couple broken •Max. Temperature : 500 °C with inert gas or vacuum •Software and PC interface is built in the controller with RS232 connector, which can connect a PC to achieve computer control ( click picture below middle to see details ) •Digital pressure meter ( controller ) is built outside vacuum chamber. You can set pressure at desired value, then electroc hydraulic press will stop automatically at the setting point.
Vacuum Charmber
•Electric hydraulic press and heating plates are placed inside the vacuum chamber •Vacuum chamber is made of 304 stainless steel with reinforcing rib to ensure the vacuum reach 10E-2 torr without deformation •Inside vacuum chamber size : 372 mm (L) x 420 mm (W) x 480 mm (H) •Vacuum sealed 150 mm diameter glass window is installed on front door for easy observation •Silicone O-ring is used for all vacuum seal •One precision digital vacuum guage ( 10E-4 torr ) is installed on vacuum chamber
Power Requirement
•Power consuming : 2500 W •Power input : 208 - 240 VAC, 50/60 Hz single phase •Max. Heating rate : < 10 °C
Optional
You may need to order the following equipment as optional at the extra cost
Overall Dimensions
600 mm (L) x 500 mm (W) x 400 mm (H)
Warranty
•The pressing machine was quality inspected in USA, lifetime support is provided •One year limited standard warranty (Extended warranty is available upto 5 years at extra cost)
