VBF-1200X-E8 is a vertical vacuum furnace with a 7.5" ID x 13.4"L quartz chamber and automatic bottom loading mechanism designed for easy sample loading. Water-cooled SS vacuum flanges are lifted via motor and can achieve vacuum 10-2 to 10-5 torr through a mechanical or molecular pump. It is designed for sintering material or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100 °C. Programmable temperature controller, vacuum pump and recirculating water chiller are included for immediate use.
SPECIFICATIONS
Structure
•Double layer steel casing with air cooling keeps furnace surface temperature lower than 60 °C. •High purity fibrous alumina insulation for maximum energy saving. •Water cooled vacuum flange for longer service life •Quazt chamber for clean treatment •Automatic bottom loading for easy operation
•<= 1000 °C continuously •Max. 1100 °C, < 30 minutes •Temperature Uniformity: +/- 2 °C
Heating Elements
High quality Ni-Cr-Al resistance wire as heating elements
Quartz Tube Size & Effective Heating Area
•Tube size: 8" O.D. x 7.5" I.D x 13.4" L. •Heating area: 7.5" ID x 8.5" Depth (7.6 Liter) •Uniform Temperature zone: 4" diameter x 3.5" depth in center position within +/- 5 ºC •Quartz tube is replaceable (click picture on left to order spare tubes)
Vacuum Flange
•Stainless steel vacuum flange with dual high temperature silicone O-rings. •DC motor with remote controller drives the opening and closing operations of the flange. •One KF25D port on the left side of furnace for connection to vacuum pump. •A Quartz Thermal Block (filled with fibrous alumina) is included to prevent radiation and dissipation of heat. It also provides excellent vacuuming while ensuring a clean environment inside the chamber. •A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting -- one 16 L/min recirculating water chiller is included as well. •One high quality mechanical vacuum pump, KF25 Vacuum Fitting with KF25 Right-Angle Valve and a one meter long KF25 Bellows are included (you may use a molecular pump to achive 10-5 torr vacuum) •Digital vacuum meter with wide range up to 10-4 torr is included for vacuum pressure measurement.
Temperature Controller
•MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time. •Built in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection. •Over temperature protection and alarm allows for operation without attendant(s). •+/- 1 ºC temperature accuracy. •RS485 Communication Port. •K type thermal couple. •Optional
•The furnace may be operated via PC by installing a control module. Please order a MTS-02 control module at extra cost. •If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. For more information please click here.
Gas Flow And Pressure (optional)
•There is a gas inlet (1/4" house adapter) with a valve on left side of furnace (see bottom left picture below) •Inert gas and oxygen gas flow can be introduced into the chamber via the inlet (Attention: MTI does not recommend using its products under hazardous conditions.We will not be liable for any damages incurred under hazardous conditions.For using hydrogen gas, it is prudent to place the furnace under a fume hood.) •You may choose a gas mixer to deliver multiple gases with control over gas composition and flow-rate (click pictures below to order separately).
Overall Dimensions
700 mm (L) x 650 mm (W) x 1400 mm (H)
Net Weight
160 kg
Shipping Weight
500 lbs
Shipping Volume
48" (L) x 40" (W) x 70" (H)
Warranty
•One year limited warranty with life time support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.). •ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty.
Compliance
•CE Certified •UL / MET / CSA Certification is available upon request, additional charges will apply •Temperature controller is MET and CE Certified
Application Notes
Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
