|
• Double shell casing with cooling fans
- • High purity alumina fibrous insulation for max.
energy saving
- • Split cover enables faster cooling and easy operation
- • Hydrogen detector and solenoid valve are included
for safety measures
- • The liquid evaporator is heatable with a precision
temperature controller to produce a mixing of
hydrogen and liquid vapor.
- • The hydrogen gas furnace must be placed under a
fume hood which is not included.
|
Power | 4 KW Max |
Input Voltage | AC 208 - 240V single phase (30A air breaker is required) |
Heating Elements | FeCr27Al7MO2 |
Heating Zone Length |
• Two heating zones: 8" (200 mm) length of each
zone, 16" (400 mm) total
• Constant temperature zone: 150 mm within +/- 1oC
when two zones are set at same temperature
|
Temperature Uniformity | +/- 1°C in heating Zone |
Continuous Working Temperature | 1100°C |
Recommended Heating Rate | 10°C /min |
Processing Tube and Flanges |
• High purity quartz tube: Φ80 (OD)×Φ74 (ID) ×
1000 L, mm
- • Vacuum flange: SS304 flanges are included to
achieve vacuum up to 10^ - 5 torr by turbopump.
|
Temperature Controllers
  |
• Two MET certified digital temperature controllers
with 30 programmable segments for precise control
of heating rate, cooling rate and dwell time.
- • Built in PID Auto-Tune function with overheating &
broken thermocouple protection.
- • Over temperature protection and alarm allows for
operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 port is installed in front of panel for PC
connection
- • PC control module and software is included
forcomputerized temperature control.
Click here to review detailed information.
|
Float Flow Meter
|
• Two flowmeters 50-500ml/min are built on the gas
inlets.
- • One flowmeter is for Hydrogen delivery while the
other is mainly for CVD gas with liquid vapor
- • The extra flowmeter is available upon request at
extra cost.
- • You may consider using our MFC gas delivery
station 1 - 9 channel for more accurate gas control
|
Bubbler/ Liquid Evaporator
 |
• Such a liquid evaporator is suitable for liquid sources
and chemical precursors delivery in CVD processes.
- • One stainless steel container is included with
capacity of 600 ml ( 80OD x 200H, mm)
- • The container is inserted into a small cylindrical
heater with thermal insulation
- • The container can be heated up to 250°C and
controlled by a precision programmable temperature
controller.
- • Two SS needle valves and one pressure gauge are
built on the container (click picture below to see
details)
|
Humidity Monitor
( included) |
• One precision humidity monitor is connected to the
processing tube flange with KF25 adaptor
- • Measurement range : 0 - 100% RH with 1.5%FS
accuracy, or -60º ~ +60º DP with +/-0.3º accuracy.
- • Tips: You may adjust the evaporator's (water inside)
temperature and H2 gas flow rate to achieve desired
humidity level.
|
Hydrogen Detector System
 (included)
|
• Working Temperature Range: 40ºF to +149ºF
(-40ºC to +65ºC)
- • Alarm Point: H2 Limited Explosive Line 10% (10%
LEL). Once detecting H2 gas beyond the point, it will
shut off the inlet valve to the H2 automatically.
|
Options for upgrading | |
| Warranty |
One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty).
|
| Compliance |
• CE Certified
- • All electric components ( >24V) of the furnace are
UL / MET / CSA certified, not including other
accessories like liquid evaporator and hydrogen
detector
- • The furnace is ready to pass TUV(UL61010) or CSA
certification at extra cost.
（ please click marks below to learn details)
    
|
Furnace Dimensions | 1400×600×1200mm |
Product Net Weight | 100Kg
|
Operation Instructions | |
Warning
Click here to learn the installation of a gas regulator
|
• Tube furnaces with alumina tubes are designed for
using under vacuum and low pressure < 0.12 atm
(absolute pressure)
- • The flow rate for gasses should be limited to < 200
SCCM (or 200 ml/min) for reducing thermal shocks
to the tube
- • Attention: A two-stage pressure regulator must
be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation.
Click here to learn the installation of a gas regulator.
- • Vacuum limit definition for all quartz tube furnaces:
* Vacuum pressures may only be safely used up to
1000°C
|
