Furnace Construction
| • Double layer steel casing with air cooling. - • Built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
- • Anti-corrosive gauge to enable vacuum measurements with aggressive gases.
- • Vacuum pump with cold trap prevents aggressive gases reaching the pump.
- • PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.
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Power Consumption | 2.5 KW |
Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz |
Maximum Temperature | 1200 °C |
Continuous workingTemperature | 1100 °C |
Maximum Heating Rate | <= 20 oC /min |
Heating Zone Length | 400 mm |
Constant Temperature Zone | 150mm (+/-1°C) |
Temperature Accuracy | +/- 1°C |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers
| • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.- • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- Advanced Temperature Control (Optional)
- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
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Tube Size and Materials | Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm |
Digital Vacuum Gauge | • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.- • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure
range (10^-5 ~ 1000 torr).
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Vacuum Sealing Flanges
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Vacuum Pump
| • 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr. - • Stainless steel hose tube is included for connecting to tube furnace.
- • A cold trap is included to capture corrosive material.
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Gas Flow Meter and Pressure Meter
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Oxygen Monitoring (Optional)
| • An Oxygen Sensor can be purchased to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
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Dimensions
| • Furnace: 550 x 380 x 520 mm- • Bottom Mobile case: 600 x 600 x 650 mm
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Net Weight | ~ 70 kg |
Shipping weight | 350 lbs |
Shipping Dimensions | Two cases in one pallet: 45"x45"x35" /case |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional)
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Compliance | CE Certified |
Application Notes
Click here to learn the installation of a gas regulator
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Operation Instructions
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