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CVD/PECVD furnace system UL/CSA Ready

Compact Auto-Sliding Tube Furnace (50mm OD, 1200°C max.) with Flanges for Fast Heating / Cooling - OTF-1200X-50-SL

Compact Auto-Sliding Tube Furnace (50mm OD, 1200°C max.) with Flanges for Fast Heating / Cooling - OTF-1200X-50-SL

기본 정보
Product Name Compact Auto-Sliding Tube Furnace (50mm OD, 1200°C max.) with Flanges for Fast Heating / Cooling - OTF-1200X-50-SL
Sale Price Call for Price
Product Code OTF-1200X-50-SL
Quantity 수량증가수량감소
상품 옵션
  • OTF-1200X-50-SL is a compact automatic sliiding tube furnace with 2"OD x 36" L quartz tube and flanges with 1200°C max. working temperature.  The automatic sliding mechanisim the furnace sliding from one side to another to achieve max. heating and cooling rates > 100°C/min.  For fastest heating, the furnace may be pre-heated to a desired temperature and then be slided to the sample's position.  As for fastest cooling, the furnace can be slided to another side after sample heating is completed.  Moreover, the heating and cooling rates may reach 15°C/s under vacuum or inert gases.  This furnace provides an alternative for rapid thermal processing at the lowest cost.
  • Furnace Structure
  • Double layer steel structure with dual air cooling fans
    One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side
    Vacuum flanges and a digital vacuum gauge  are installed for immediate use.
  • Power
  • 1.5 KW
  • Voltage
  • AC 110V Single Phase,
    50/60 Hz
  • Max. Temperature
  • 1200°C (< 1 hour) with flowing gas
  • Continuous Temperature
  • 1100°C
  • Heating & Cooling Rates 
  • Heating Rate : Cooling Rate :
    15°C/sec (RT - 150°C);
    10°C/sec (150°C - 250°C);
    7°C/sec (250°C - 350°C);
    4°C/sec (350°C - 500°C);
    3°C/sec (350°C - 550°C);
    2°C/sec (550°C - 650°C);
    1°C/sec (650°C - 800°C);
    0.5°C/sec (800°C - 1000°C);
    15°C/sec (1000 - 950°C);
    10°C/sec (950°C - 900°C);
    7°C/sec (900°C - 850°C);
    4°C/sec (850°C - 750°C);
    2°C/sec (750°C - 600°C);
    1.5°C/sec (600°C - 500°C);
    1°C/sec (500°C - 400°C);
    0.5°C/sec (400°C - 300°C);
    Note: The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.
  • Heating Zone Length
  • 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.  
  • Constant Temperature Zone
  • 2.3" (60mm) (+/-1°C) @ 1000 °C
  • Heating Elements
  • Fe-Cr-Al Alloy doped by Mo
  • Processing Tube 
  • High purity fused quartz tube
    Size: OD: 2" x ID: 1.8." x Length: 39" (inch)
     (50 mm OD x 46mm ID x 1000 mm L)
    Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring
  • Temperature Controller
    & Sliding Control
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    Built-in over temperature alarm and protection allows for operation without attendant.
    Two K type thermal couples are included. One is bilt in furnace to control furnace temperature, and another in serted into tube to monitor sample real temperature profile.
    The controller aslo slide furnace to cold end as programma

    The furnace may be operated by PC by installing a control module.  Please order a MTS-02 control module  at extra cost.
    If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. For more information please click here.       

  • Temperature Accuracy
  • +/ - 1°C
  • Vacuum Flanges
  • Vacuum sealed flange with SS needle valves and vacuum guage are included for immediate use  
  • Vacuum Level
  • Limited by pump ( pump is not included, click on pictures to order )

    10E-5 torr can be reached by molecular pump
    10E-2 torr by mechanical pump.    

  • Sliding Rails / Table
  • Double sliding rail made by Cr plated steel
    Sliding length: 1200 mm
  • Dimensions
  • 1200 L x 400 W x 500 H, mm
  • Net Weight
  • ~ 100 Kg
  • Shipping Package Size
  • 70" x 45" x 45" (inch)
  • Shipping Weight
  • 350 lbs
  • Warranty
  • One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
  • Compliance
  • CE Certified
    UL / MET / CSA Certification is available upon request,
     additional charges will apply
    Temperature controller is MET and CE Certified