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SOS(Silicon on Sapphire) Wafers (DSP-Double sides polished)
Silicon EPI Layer
• Silicon Orientation: (100)
• Type, Dopant: Intrinsic type, undoped
• Silicon Thickness: 0.6um +/- 10%
• Resistivity: > 100 ohm.cm
• Silicon epi film on C plate sapphire is available upon request
Sapphire Wafer
• R plane -- (1-102) with single flat
• Wafer size: 100mm dia x 0.53 mm thickness
• Orientation Flat Length: 32.5mm +/-2.5mm ,
• Flatness:10um, Parallelism:20um
• Polished surface: Wafer surface is EPI polished via a special CMP procedure.
• One side polished
• Projected C-Axis: 45 degree +/- 2 degree
• Backside Surface: fine ground and etched; Roughness: Ground-64u" Ra