GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100 °C, which is controlled by a precision controller with accuracy +/- 1 °C and 30 segments programmable.
SPECIFICATIONS
Furnace structure
•Double wall steel casing with forced air cooling. •Two cooling fan inside to keep temperature of outside case < 70 ºC •High purity alumina fibrous insulation for max energy saving •One sliding rail to support flange to load sample with ease •Three heating zone to achieve longer constant temperature zone or a certain temperature gradient
Input voltage
220 VAC Single phase
power
8 kW
Fused quartz tube size
•8.5" O.D x 8.2" I.D x 51" Length •One quartz tube is included, and spare tube is available as option ( click picture below to order )
Heating element
NiCrAl Resistance Wire
Working Temperature
•Max. heating temperature : 1100 °C •Continuous working temperature : 400 - 1000 °C •Max. heating/cooling rate : 10 °C/min
Heating zone
•Total heating zone length 900 mm (36") •Three zones : 300 mm + 300 mm + 300 mm (12" per zone) •Constant temperature zone : 500 mm (if three zones are in the same temperature)
Temperature controller
•Three precision temperature controller with PID function and 30 segments programmable •One extra temperature monitor is built in to shut down power when temperature out of control by accident •Double K type thermal couple installed. •Temperature accuracy : +/- 1 °C •Software and PC interface module is available at extra cost•Optional : PC interface & software
Vacuum Flange and gas feedthough ports
•Vacuum sealed stainless steel flanges with double high temperature silicone O-ring are included to achieve high vacuum (Usually 10-2 torr by mechanical pump and 10-4 torr by molecular pump ). Vacuum pump is not included •Right-side flange is hinge-type and KF25 vacuum port. KF25 Vacuum Right-Angle Valve and 1.2 meter long KF-40 Flexible Stainless Steel Vacuum Hose ( Bellows ), are included. One 1/4" diameter feedthough port is in built one flange for insert a thermal couple to calibrate furnace temperature. ( please order 36" length x 1/4"dia K type thermal couple to insert the feedthough at related product or click underlined )
•One quartz block is included, which must put right end of tube to blcok heat radiation
•Left-side flange is install on slidable table to make moving at easy. There are five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.
•Furnace : 1300 L x 680 W x 920 H mm •Sliding Table : 600 mm L •Note : You must put furnace and sliding table on flat surface. Must make good alignment between sliding flange and furnace ( We ship sliding table and furnace separately )
Net weight
354 Kg
Shipping dimension
70" x 70" x 65"
Shipping weight
354 Kg
Warranty
One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
Compliance
•CE Certified •UL / MET / CSA Certification is available upon request, additional charges will apply •Temperature controller is MET and CE Certified
Warning
The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
OPTIONAL ACCESSORY
Part No.
Description
Quick Link
Quartz tube block /heat insulating tube block (Compare with the conventional ceramic block, quartz thermal block with alumina fiber inside can help achieve higher vacuum level and avoid potential contamination problems.)
